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I2FSR - Improved Flared Silicon Ridge

I2FSR
Line with sharp, overhanging edges.

 

I2FSR - Improved Flared Silicon Ridge

 

Line with sharp, overhanging edges.

 

Specifications
Material Silicon coated with Siliconnitride
Width of line ~ 2 µm 
Depth of line > 4 µm
Overhang > 250 nm
Overhang slope angle ~ 35°
Top corner radius < 10 nm
Edge roughness < 10 nm
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