Tip width characterizer with an array of 5 lines 100 nm wide and a single line 100 nm wide for larger tips.
Sidewalls are vertical and parallel (111-crystal planes).
| Material | Silicon |
| Width of line | 100 nm actual linewidth is delivered for each chip |
| Pitch | 500 nm ± 10nm |
| Depth of line | ~ 1 µm |
| Surface/sidewall angle | < 90° ± 0,5° |
| Sidewall parallelity | < 1° |
| Top corner radius | < 10 nm |
Also well suited as SEM standard
