The Multiple Layer Film (MLF) for depth profiling analysis is a CRM for depth distribution analysis through various surface analysis methods, such as XPS, AES, and SIMS. It is used to measure sputtering rates or to evaluate depth resolution.
The KRC-MLF has five Si and five Ge layers alternately deposited with a thickness of 10, 20, 50 nm and can be used for the evaluation of depth resolution during depth profiling analysis by AES, XPS, and SIMS.
