首页 產品介紹 Kims Reference 標準片(Reference Material) Characterization of instrument SSRM Characterizer KRC-SSRM-100 CRM for the characterization of SSCM KRC-SSRM-100

CRM for the characterization of SSCM KRC-SSRM-100

KRC-SSRM-100
Activated layer width: 5 nm, 10 nm, 15 nm, 20 nm, 40 nm Pattern length: 4.0 mm (certified area: 3.0 mm from enter)
Roughness (Rq): max 0.5 nm Defectivity: max 2% (max 60 um within 3,000 μm certified area)
Traceability: Si lattice constant measured by TEM

Main Specifications of KRC-SSRM-100

  • The CRM for the evaluation of scanning spreading resistance microscopy (SSRM) is a nanostructure with multiple certified activated doping layers. It can be used as a CRM to check the operation of SSRMs and evaluating the spatial resolution of SSRMs.
  • The KRC-SSRM-100 is a nanostructure standard with four doping layers sequentially arranged with an activated doping layer width of 5 - 40 nm, which is used for the evaluation of SSRM spatial resolution.
  • Specifications of KRC-TSC-200                                                                                      
Item Detailed Specifications
Pattern width 180 nm
Trench width 400 nm
Pattern height 1,000 nm (not certified)
Pattern length 4.0 mm (certified area: 3.0 mm from center)
Roughness (Rq) max 1.0 nm
Defectivity max 1% (max 60 um within 3,000 μm certified area)
Traceability Si lattice constant measured by TEM: ILAC-MRA, KOLAS
  • TEM Image and SSRM line profile                                     

                                                                                                                                            

               Structure of Nano Pattern                                    Circular Coupon type product

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  •                                   KRC-SSRM-100                                                                        
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