首页 產品介紹 Kims Reference 標準片(Reference Material) Characterization of instrument AFM Tip Shape Checker KRC-TSC-200 CRM for the Checking of Tip Shape KRC-TSC-200

CRM for the Checking of Tip Shape KRC-TSC-200

KRC-TSC-200
Pattern width: 180 nm Trench width: 400 nm
Pattern height: 1,000 nm (not certified) Pattern length: 4.0 mm (certified area: 3.0 mm from center)

Overview of KRC-TSC-200

  • The tip shape checker is a nanostructure with a single isolated line width and is used to check the overall shape of the AFM probe. If the certified line width is eliminated from the AFM line profile of an isolated line between the two 400 nm wide trenches, the shape of the probe can be obtained.
  • Specifications of KRC-TSC-200                                                                                      
Item Detailed Specifications
Pattern width 180 nm
Trench width 400 nm
Pattern height 1,000 nm (not certified)
Pattern length 4.0 mm (certified area: 3.0 mm from center)
Roughness (Rq) max 1.0 nm
Defectivity max 1% (max 60 um within 3,000 μm certified area)
Traceability Si lattice constant measured by TEM: ILAC-MRA, KOLAS
  • SEM Image and AFM line profile                                      

                                                                                                                                            

               Structure of Nano Pattern                                    Circular Coupon type product

  •                                                                              
  •                                   KRC-TSC-200                                                                        
  •  
询价(0)