首页 產品介紹 Kims Reference 標準片(Reference Material) Characterization of instrument AFM Tip Characterizer KRC-ATC-20 CRM for the characterization of AFM tip KRC-ATC-200

CRM for the characterization of AFM tip KRC-ATC-200

KRC-ATC-200P [CC-X]
Trench width: 50 nm, 100 nm, 200 nm Pattern width: 50 nm (not certified)
Trench Height: 100 nm (not certified) Pattern length:4.0 mm (certified area: 3.0 mm from center)

Overview of KRC-ATC-200

  • The AFM Tip Characterizer (ATC) is a nanostructure CRM with a number of certified trenches. It is used to check the properties of AFM tips such as radius and cone angle before the AFM measurement.
  • The KRC-ATC-200 has 3 trenches with widths of between 50 - 200 nm and can be used to evaluate general AFM tips.
  • Specifications of KRC-ATC-200                                                                                        
Item Detailed Specifications
Trench width 50 nm, 100 nm, 200 nm
Pattern width 50 nm (not certified)
Trench Height 100 nm (not certified)
Pattern length 4.0 mm (certified area: 3.0 mm from center)
Roughness (Rq) max 0.5 nm
Defectivity max 2% (max 60 um within 3,000 μm certified area)
Traceability Si lattice constant measured by TEM: ILAC-MRA, KOLAS
  • SEM Image and AFM line profile                                      

                                                                                                                                                  

         Structure of Nano Pattern                                                 Circular Coupon type product

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  •                          KRC-ATC-200                                                                        
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