产品介绍

Overview of KRC-NSC-100

• Nano Step-height Calibrator (NSC) is a CRM to calibrate the step height of atomic force microscopes (AFM) by comparing the measured and certified step-height values.
• A step-height correction factor (fc) can be determined from the ratio of the measured and certified step-height values of the CRM and the step-height of the target nanostructure can be accurately obtained from the step-height correction factor.
• Specifications of KRC-NSC-100                                                                                         

• Item	Detailed Specifications
  Pattern height	100 nm
  Pattern pitch	3, 5, 10 um
  Specimen size	5 mm x 5 mm
  Pattern size	1 mm x 1 mm
  Defectivity	max 1%
  Traceability	Si lattice constant measured by TEM: ILAC-MRA, KOLAS

• Calibration of step-height by KRC-NSC-100                                   Structure of Nano Pattern
•                              
•  
• AFM Profiles                                                                                     Circular Coupon type product
•                           
•                              Wafer type product
•