首页 產品介紹 Kims Reference 標準片(Reference Material) Calibration of high magnification High Magnification Calibrator KRC-HMC-100 CRM for the calibration of high magnification KRC-HMC-100

CRM for the calibration of high magnification KRC-HMC-100

KRC-HMC-100
Pattern width: 5 certified widths of 20 nm ~ 80 nm Pattern pitch: 5 certified pitchs of 100 nm ~ 900 nm

Overview of KRC-HMC-100

  • The High Magnification Calibrator (HMC) is a CRM to calibrate the magnification of atomic force microscopes (AFM) and scanning electron microscopes (SEM) by comparing the measured and certified pitch values.
  • KRC-HMC-100 is also used to calibrate the offset values in AFM and SEM measurements by comparing the measured and certified width values.
  • Specifications of KRC-HMC-100
  • Item Detailed Specifications
    Pattern width 5 certified widths of 20 nm ~ 80 nm
    Pattern pitch 5 certified pitchs of 100 nm ~ 900 nm
    Pattern height 70 nm (not certified)
    Pattern length 4.0 mm (certified area: 3.0 mm from center)
    Roughness (Rq) max 0.5 nm
    Defectivity max 1% (max 30 um within 3,000 μ certified area)
    Traceability Si lattice constant measured by TEM: ILAC-MRA, KOLAS
  • AFM Offset Calibration                                                                           Structure of Nano Pattern
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  •                                                                                                                                                             KRC-HMC-100P-CC-X
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  • AFM Magnification Calibration                                                             AFM Magnification Calibration
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  • SEM Magnification Calibration                                                               SEM Magnification Calibration
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