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Kims Reference 標準片(Reference Material)
Characterization of instrument
AFM Tip Shape Checker KRC-TSC-200
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CRM for the Checking of Tip Shape KRC-TSC-200
KRC-TSC-200
Pattern width: 180 nm
Trench width: 400 nm
Pattern height: 1,000 nm (not certified)
Pattern length: 4.0 mm (certified area: 3.0 mm from center)
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