SEM image of the cantilever
Schematic drawing of the cantilever
| Cantilever | Resonance Frequency, kHz | Force Constant, N/m | Length l ± 5, |
Width w ± 3, |
Thickness t ± 0.5, |
||||
|---|---|---|---|---|---|---|---|---|---|
| min | typ | max | min | typ | max | µm | µm | µm | |
| 16 Series | 170 | 190 | 210 | 30 | 45 | 70 | 225 | 37.5 | 7.0 |
*The full cone angle may be less than 40° at the last 200 nm of the tip end.
