SEM image of the cantilever
Schematic drawing of the cantilever
| Cantilever | Resonance Frequency, kHz | Force Constant, N/m | Length l ± 5, |
Width w ± 3, |
Thickness t ± 0.5, |
||||
|---|---|---|---|---|---|---|---|---|---|
| min | typ | max | min | typ | max | µm | µm | µm | |
| 17 Series | 10 | 13 | 17 | 0.06 | 0.18 | 0.4 | 450 | 50 | 2.0 |
