SEM image of the cantilever
Schematic drawing of the cantilever
Cantilever | Resonance Frequency, kHz | Force Constant, N/m | Length l ± 5, |
Width w ± 3, |
Thickness t ± 0.5, |
||||
---|---|---|---|---|---|---|---|---|---|
min | typ | max | min | typ | max | µm | µm | µm | |
19 Series | 25 | 65 | 120 | 0.05 | 0.5 | 2.3 | 125 | 22.5 | 1.0 |
*The full cone angle may be less than 40° at the last 200 nm of the tip end.