SEM image of the cantilever
Schematic drawing of the cantilever
| Cantilever | Resonance Frequency, kHz | Force Constant, N/m | Length l ± 5, |
Width w ± 3, |
Thickness t ± 0.5, |
||||
|---|---|---|---|---|---|---|---|---|---|
| min | typ | max | min | typ | max | µm | µm | µm | |
| 18 Series | 60 | 75 | 90 | 1.2 | 2.8 | 5.5 | 225 | 27.5 | 3.0 |
*The full cone angle may be less than 40° at the last 200 nm of the tip end.
