 |
Small quantily | unit wafer unit |
|---|---|---|
| 34 chips/unit | 245 chips/wafer | |
| Soft type | OMCL-TR400PSA-1 | OMCL-TR400PSAHW |
| 34 chips/unit | 490 chips/wafer | |
| Standard type | OMCL-TR800PSA-1 | OMCL-TR800PSA-W |
| 34 chips/unit | 490 chips/wafer | |
| LFM type | OMCL-RC800PSA-1 | OMCL-RC800PSA-W |
OLYMPUS pyramidal tip (below) is stably sharpened by our special fabrication process, and its small radius of the tip are achieved. OLYMPUS introduced this type of the tip in the first time in the world in 1991. You never doubt this type of the tip becomes standard for contact mode AFM measurements.
The tips are made of silicon nitride, which is less prone to wear than single-crystal silicon. This helps to minimize image changes caused by wear of the tip.
Below is an SEM image of a sharpened pyramidal tip (side view). As can be seen in the picture, the pyramidal tip is sharpened toward the tip apex.
Two pairs of different shapes of triangular cantilevers protrude from both sides of a glass chip.
Lever thickness:
400nm and 800nm
Thin gold/chromium film is coated on the back side of the cantilevers for reflecting light from a deflection sensor in the AFM equipment. Transparency of the lever with reflex coating for visible light is 1% or less.
Number of chips in a cantilever strip : 34 chips 2 extra chip
Either triangular or rectangular cantilevers extend from a glass chip. Each chip is connected at the bottom of the glass chip and makes a chip array (call it “cantilever strip“). The left illustration shows a part of the array of rectangular cantilever chips.
Stiffness [N/m] and resonant frequency [Hz] of each cantileves are Calculated values under the vacuum condition, or no-damping condition.
| Lever | Tip | ||||||
|---|---|---|---|---|---|---|---|
| thickness (nm) |
length (µm) |
width (µm) |
spring const. (N/m) |
resonant freq. (kHz) |
height (µm) |
radius (nm) |
|
| Triangular cantilever with reflect coating | |||||||
| OMCL-TR400PSA- | 400 | 100 200 |
* | 0.08 0.02 |
34 11 |
2.9 | 15 |
| OMCL-TR800PSA- | 800 | 100 200 |
* | 0.57 0.15 |
73 24 |
2.9 | 15 |
| Rectangular cantilever with reflect coating | |||||||
| OMCL-RC800PSA- | 800 | 100 100 200 200 |
20 40 20 40 |
0.39 0.76 0.05 0.10 |
69 71 18 19 |
2.9 | 15 |
note:
The resonant frequency of each of the cantilevers shift lower in water than in vacuum or in air because of the water damping. For instance in OMCL-TR400PSA-, the resonant frequencies of the 100µm and 200µm long cantilevers shift around 7kHz and 3kHz in water respectively.
